Plasma asher R3T Muegg STP 2020
Description
Polymer asher
for removing SU8 and BCB
5 places for 6" substratesAvailable Gas: O2, N2, CF4
HF Power: 3000 W
2,45 GHz
PROVIDER
CONTACT
Polymer asher
for removing SU8 and BCB
5 places for 6" substratesAvailable Gas: O2, N2, CF4
HF Power: 3000 W
2,45 GHz